M'dziko lovuta kwambiri la kupanga semiconductor, kumene kusintha kwa zinthu kumachitika pamlingo wa atomiki, implantation ya ayoni imakhala ngati ukadaulo wapangodya. Izi, zomwe zimawombera bwino zowotcha za silicon ndi ma ion ma dopant kuti ziwongolere mphamvu zawo zamagetsi, zimadalira poyambira poyambira: kupanga mtengo wa ayoni wokhazikika, wokhazikika. Pakatikati penipeni pa gwero la ion ion source-injini ya makina ovutawa-pali chigawo chimodzi chomwe chimatsimikizira kulimba m'mikhalidwe yovuta kwambiri: tungsten filament.
Waya wopindika wonyozeka umenewu, kwenikweni, ndi wodabwitsa wa sayansi ya zinthu zakuthupi. Malo oyika ma ion ndi ankhanza kwambiri: amaphatikiza kutentha kotentha, ma chemistry owononga kuchokera ku mpweya ngati BF₃ kapena PH₃, komanso kuphulika kwa tinthu kosalekeza. Ulusi, womwe nthawi zambiri umagwira ntchito ngati cathode, uyenera kutenthedwa mpaka incandescence kuti utulutse ma elekitironi ofunikira kuyatsa ndi kusunga plasma. Kulephera apa kumabweretsa kusakhazikika kwa mtengo, kuipitsidwa kwazitsulo, komanso kutsika kwamitengo yotsika mtengo.
Chifukwa chiyani tungsten amalamulira kwambiri ntchitoyi? Yankho lagona muzinthu zake zosayerekezeka:
Kukana Kutentha Kwambiri: Pokhala ndi malo osungunuka kwambiri azitsulo zonse (digiri ya 3422), tungsten filament imasunga umphumphu pamene ena alephera.
Superior Sputter Resistance: Imakana kukokoloka kwa bombardment ya plasma, kuwonetsetsa kuti moyo wautali komanso matabwa a ion ayeretsedwe.
Kutulutsa kwa Electron Kwabwino Kwambiri: Kapangidwe kake ka thermionic ndi koyenera kupanga ma elekitironi osasinthasintha omwe amafunikira pakupanga kokhazikika kwa plasma, makamaka m'magwero a Indirectly Heated Cathode (IHC).
Zofunikira za-zida zamagetsi zamtundu wina, kuphatikiza zida zamagetsi za silicon carbide (SiC) ndi gallium nitride (GaN), zimapititsa patsogolo ukadaulo wa implantation. Izi zimapangitsa kuti pakhale zodalirika komanso zapamwamba,{2}}zimene zimagwira ntchito kwambiri. Tungsten filament yasintha kuchoka pa waya wosavuta kupita ku yolondola-yomwe imatha kudyedwa mwaukadaulo, ndipo yatsogola kwambiri pakuwongolera kapangidwe ka tirigu ndi doping (monga zopezeka-zokhala ndi ma oxides apansi) zomwe zimawonjezera kulimba kwake komanso kutulutsa mpweya wabwino.
Kupeza zolingazi-zofunika kwambiri kumafuna wothandizana naye yemwe ali ndi ukadaulo wozama komanso wodzipereka pakulondola. Kwa zaka zoposa makumi awiri, Zhuzhou Kingdon Industrial & Commercial Co., Ltd (W/Mo Kuyambira 2004) lakhala dzina lodalirika pazitsulo zapamwamba zokanirira. Katswiri wa zinthu za tungsten ndi molybdenum, Kingdon amapereka-zoyera kwambiri, zopangidwa nthawi zonse zofunika pakugwiritsa ntchito movutikira monga implantation ya ion.
Kwa mainjiniya ndi akatswiri ogula zinthu omwe akufunafuna magawo odalirika a gwero la ion, kuphatikiza-zowoneka bwino kwambiri za tungsten filaments, Zhuzhou Kingdon imapereka ukatswiri wotsimikiziridwa ndi kupanga bwino kwambiri.
Zhuzhou Kingdon Industrial & Commercial Co., Ltd (W/Mo Kuyambira 2004)
Onjezani: No.9 Road of Zhongda, High{1}}Tech Industrial park, Zhuzhou, Hunan, China
Tel: +86-731 28470377 / 22868227
Fax: +86-731 28410491
Webusaiti:www.kdmet.com
